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1

Grown-in defects in nitrogen-doped Czochralski silicon

Yu, Xuegong, Yang, Deren, Ma, Xiangyang, Yang, Jiansong, Li, Liben, Que, Duanlin

Journal:

Journal of Applied Physics

Year:

2002

Language:

english

File:

PDF, 533 KB

english, 2002

2

Effect of oxygen precipitates and induced dislocations on oxidation-induced stacking faults in nitrogen-doped Czochralski silicon

Wang, Hongjie, Yang, Deren, Yu, Xuegong, Ma, Xiangyang, Tian, Daxi, Shen, Yijun, Li, Liben, Que, Duanlin

Journal:

Journal of Applied Physics

Year:

2004

Language:

english

File:

PDF, 442 KB

english, 2004

3

Crystal growth and oxygen precipitation behavior of 300 mm nitrogen-doped Czochralski silicon

Daxi Tian, Deren Yang, Xiangyang Ma, Liben Li, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2006

Language:

english

File:

PDF, 236 KB

english, 2006

4

Oxygen precipitate denuded zone formation in Czochralski silicon wafer based on rapid thermal processing in nitrogen ambient

Fu, Liming, Yang, Deren, Ma, Xiangyang, Jiang, Hanqin, Que, Duanlin

Journal:

Semiconductor Science and Technology

Year:

2007

Language:

english

File:

PDF, 503 KB

english, 2007

5

Oxidation-induced stacking faults and related grown-in oxygen precipitates in nitrogen-doped Czochralski silicon

Yu, Xuegong, Yang, Deren, Ma, Xiangyang, Shen, Yejun, Tian, Daxi, Li, Liben, Que, Duanlin

Journal:

Semiconductor Science and Technology

Year:

2003

Language:

english

File:

PDF, 323 KB

english, 2003

6

Thermal Warpage of Czochralski Silicon Wafers Grown under a Nitrogen Ambience

Huanming Lu, Deren Yang, Liben Li, Zhizhen Ye, Duanlin Que

Journal:

physica status solidi (a)

Year:

1998

Language:

english

File:

PDF, 141 KB

english, 1998

7

Impurity engineering of Czochralski silicon used for ultra large-scaled-integrated circuits

Deren Yang, Jiahe Chen, Xiangyang Ma, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2009

Language:

english

File:

PDF, 697 KB

english, 2009

8

Effect of rapid thermal process on oxygen precipitation and denuded zone in nitrogen-doped silicon wafers

Xuegong Yu, Deren Yang, Xiangyang Ma, Duanlin Que

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 321 KB

english, 2003

9

Influence of copper precipitation on oxygen precipitation in Czochralski silicon

Xi, Zhenqiang, Yang, Deren, Chen, Jun, Xu, Jin, Ji, Yujie, Que, Duanlin, Moeller, H J

Journal:

Semiconductor Science and Technology

Year:

2004

Language:

english

File:

PDF, 220 KB

english, 2004

10

Hydrogen annealing of grown-in voids in nitrogen-doped Czochralski grown silicon

Yu, Xuegong, Yang, Deren, Ma, Xiangyang, Li, Liben, Que, Duanlin

Journal:

Semiconductor Science and Technology

Year:

2003

Language:

english

File:

PDF, 143 KB

english, 2003

11

Oxygen precipitation in heavily phosphorus-doped silicon wafer annealed at high temperatures

Yuheng Zeng, Deren Yang, Xiangyang Ma, Jiahe Chen, Duanlin Que

Journal:

Materials Science and Engineering: B

Year:

2009

Language:

english

File:

PDF, 612 KB

english, 2009

12

Influence of oxygen precipitates on the warpage of annealed silicon wafers

Deren Yang, Gan Wang, Jin Xu, Dongsheng Li, Duanlin Que, C. Funke, H.J. Moeller

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 292 KB

english, 2003

13

Effect of annealing atmosphere on oxygen precipitation and formation of denuded zone in Czochralski silicon wafer

Can Cui, Deren Yang, Xiangyang Ma, Ruixin Fan, Duanlin Que

Journal:

physica status solidi (a)

Year:

2006

Language:

english

File:

PDF, 282 KB

english, 2006

14

Effects of two-step rapid thermal processing in different ambients on denuded zone and oxygen precipitation in Czochralski silicon

Liming Fu, Deren Yang, Xiangyang Ma, Can Cui, an. Duanlin Que

Journal:

physica status solidi (c)

Year:

2007

Language:

english

File:

PDF, 380 KB

english, 2007

15

Preparation of bismuth substituted dysprosium iron garnet film by a sol-gel process

XIANGYANG Ma, SHOUYE Zhang, FENGZHEN Li, DUANLIN Que, WU Li

Journal:

Journal of Materials Science: Materials in Electronics

Year:

1998

Language:

english

File:

PDF, 220 KB

english, 1998

16

Hydrothermal synthesis of flower-like Bi2S3 with nanorods in the diameter region of 30 nm

Zhang, Hui, Yang, Deren, Li, Shenzhong, Ji, Yujie, Ma, Xiangyang, Que, Duanlin

Journal:

Year:

2004

Language:

english

File:

PDF, 468 KB

english, 2004

17

Behavior of oxidation-induced stacking faults in annealed Czochralski silicon doped by nitrogen

Yang, Deren, Chu, Jia, Xu, Jin, Que, Duanlin

Journal:

Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 556 KB

english, 2003

18

Synthesis of flower-like ZnO nanostructures by an organic-free hydrothermal process

Zhang, Hui, Yang, Deren, Ma, Xiangyang, Ji, Yujie, Xu, Jin, Que, Duanlin

Journal:

Year:

2004

Language:

english

File:

PDF, 346 KB

english, 2004

19

[IEEE 2012 IEEE 9th International Conference on Group IV Photonics (GFP) - San Diego, CA, USA (2012.08.29-2012.08.31)] The 9th International Conference on Group IV Photonics (GFP) - The improvement effect of carrier injection by Ag nanoparticles on the electroluminescence of SiNx-based LEDs

Wang, Feng, Li, Dongsheng, Ren, Changrui, Yang, Deren, Que, Duanlin

Year:

2012

Language:

english

File:

PDF, 514 KB

english, 2012

20

Germanium effect on oxygen precipitation in Czochralski silicon

Li, Hong, Yang, Deren, Ma, Xiangyang, Yu, Xuegong, Que, Duanlin

Journal:

Journal of Applied Physics

Year:

2004

Language:

english

File:

PDF, 579 KB

english, 2004

21

Effect of silicon interstitials on Cu precipitation in n-type Czochralski silicon

Wang, Weiyan, Yang, Deren, Ma, Xiangyang, Que, Duanlin

Journal:

Journal of Applied Physics

Year:

2008

Language:

english

File:

PDF, 508 KB

english, 2008

22

Nitrogen–Oxygen Complexes in Silicon

Deren Yang, Duanlin Que, Koji Sumino

Journal:

physica status solidi (b)

Year:

1998

Language:

english

File:

PDF, 139 KB

english, 1998

23

Influence of Dislocations on Nitrogen–Oxygen Complex in Silicon

Deren Yang, Duanlin Que

Journal:

physica status solidi (a)

Year:

1999

Language:

english

File:

PDF, 119 KB

english, 1999

24

Electrical Activity of Nitrogen–Oxygen Complexes in Silicon

Xiaodong Pi, Deren Yang, Xiangyang Ma, Qiong Shui, Duanlin Que

Journal:

physica status solidi (b)

Year:

2000

Language:

english

File:

PDF, 82 KB

english, 2000

25

Excitation transfer from porous silicon to polymer

Dongsheng Li, Deren Yang, Chenyao Zhou, Duanlin Que

Journal:

Materials Science and Engineering: B

Year:

2005

Language:

english

File:

PDF, 132 KB

english, 2005

26

Internal gettering for germanium-doped Czochralski silicon: Treated by rapid-thermal-anneal based processing simulation

Jiahe Chen, Deren Yang, Xiangyang Ma, Duanlin Que

Journal:

Materials Science and Engineering: B

Year:

2009

Language:

english

File:

PDF, 591 KB

english, 2009

27

Recombination activity of nickel in Czochralski silicon during rapid thermal process

Weiyan Wang, Zhenqiang Xi, Deren Yang, Duanlin Que

Journal:

Materials Science in Semiconductor Processing

Year:

2006

Language:

english

File:

PDF, 161 KB

english, 2006

28

Germanium-doped Czochralski silicon: Oxygen precipitates and their annealing behavior

Jiahe Chen, Deren Yang, Hong Li, Xiangyang Ma, Duanlin Que

Journal:

Materials Science in Semiconductor Processing

Year:

2006

Language:

english

File:

PDF, 298 KB

english, 2006

29

Recombination activity of nickel in nitrogen-doped Czochralski silicon treated by rapid thermal processing

Weiyan Wang, Deren Yang, Xiangyang Ma, Yuheng Zeng, Duanlin Que

Journal:

Materials Science in Semiconductor Processing

Year:

2007

Language:

english

File:

PDF, 217 KB

english, 2007

30

Bipolar structure of carrier concentration in hydrogen pre-annealing Czochralski silicon wafer

Xuegong Yu, Deren Yang, Ruixin Fan, Xiangyang Ma, Duanlin Que

Journal:

Physica B: Condensed Matter

Year:

2003

Language:

english

File:

PDF, 190 KB

english, 2003

31

Nickel precipitation in large-diameter Czochralski silicon

Zhenqiang Xi, Deren Yang, Jun Chen, Duanlin Que, H.J. Moeller

Journal:

Physica B: Condensed Matter

Year:

2004

Language:

english

File:

PDF, 252 KB

english, 2004

32

Effect of nitrogen doping on denuded zone formed by rapid thermal process in Czochralski silicon wafer

Can Cui, Deren Yang, Xiangyang Ma, Ruixin Fan, Liben Li, Duanlin Que

Journal:

Physica B: Condensed Matter

Year:

2006

Language:

english

File:

PDF, 250 KB

english, 2006

33

Transformation mechanism of Te particles into Te nanotubes and nanowires during solvothermal process

Hui Zhang, Deren Yang, Xiangyang Ma, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2006

Language:

english

File:

PDF, 343 KB

english, 2006

34

Effect of carbon doping on oxygen precipitation behavior in internal gettering processing for Czochralski silicon

Jiahe Chen, Deren Yang, Xiangyang Ma, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2006

Language:

english

File:

PDF, 239 KB

english, 2006

35

Germanium effect on as-grown oxygen precipitation in Czochralski silicon

Jiahe Chen, Deren Yang, Hong Li, Xiangyang Ma, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2006

Language:

english

File:

PDF, 203 KB

english, 2006

36

Micro-defects in Ge doped Czochralski grown Si crystals

Deren Yang, Jiahe Chen, Hong Li, Xiangyang Ma, Daxi Tian, Liben Li, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2006

Language:

english

File:

PDF, 216 KB

english, 2006

37

Dissolution of oxygen precipitates in germanium-doped Czochralski silicon during rapid thermal annealing

Jiahe Chen, Deren Yang, Xiangyang Ma, Hong Li, Liming Fu, Ming Li, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2007

Language:

english

File:

PDF, 766 KB

english, 2007

38

Phosphorus gettering of precipitated Cu in single crystalline silicon based on rapid thermal process

Xiaoqiang Li, Deren Yang, Xuegong Yu, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2010

Language:

english

File:

PDF, 1.26 MB

english, 2010

39

Effect of light germanium doping on thermal donors in Czochralski silicon wafers

Can Cui, Deren Yang, Xiangyang Ma, Ming Li, Duanlin Que

Journal:

Materials Science in Semiconductor Processing

Year:

2006

Language:

english

File:

PDF, 137 KB

english, 2006

40

A chromium-free etchant for delineation of defects in heavily doped n-type silicon wafers

Yuheng Zeng, Deren Yang, Xiangyang Ma, Zhidan Zeng, Duanlin Que, Longfei Gong, Daxi Tian, Liben Li

Journal:

Materials Science in Semiconductor Processing

Year:

2008

Language:

english

File:

PDF, 509 KB

english, 2008

41

Iron precipitation in as-received Czochralski silicon during low temperature annealing

Yuheng Zeng, Deren Yang, Zhenqiang Xi, Weiyan Wang, Duanlin Que

Journal:

Materials Science in Semiconductor Processing

Year:

2009

Language:

english

File:

PDF, 336 KB

english, 2009

42

A model for distribution of oxygen in multicrystalline silicon ingot grown by directional solidification

Zhenqiang Xi, Jun Tang, Hai Deng, Deren Yang, Duanlin Que

Journal:

Solar Energy Materials and Solar Cells

Year:

2007

Language:

english

File:

PDF, 161 KB

english, 2007

43

Germanium effect on void defects in Czochralski silicon

Deren Yang, Xuegong Yu, Xiangyang Ma, Jin Xu, Liben Li, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2002

Language:

english

File:

PDF, 102 KB

english, 2002

44

Intrinsic gettering in germanium-doped Czochralski crystal silicon crystals

Xuegong Yu, Deren Yang, Xiangyang Ma, Hong Li, Yijun Shen, Daxi Tian, Liben Li, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2003

Language:

english

File:

PDF, 179 KB

english, 2003

45

Reduction of oxygen during the crystal growth in heavily antimony-doped Czochralski silicon

Deren Yang, Chunlong Li, Muchang Luo, Jin Xu, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

2003

Language:

english

File:

PDF, 139 KB

english, 2003

46

Study on the oxygen concentration reduction in heavily Sb-doped silicon

Caichi Liu, Hongmei Wang, Yangxian Li, Qinglu Wang, Bingyan Ren, Yuesheng Xu, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

1999

Language:

english

File:

PDF, 68 KB

english, 1999

47

The growth and investigation of SiGe films on buried Ge islands

Jingyun Huang, Zhizhen Ye, Weihua Chen, Zhen Qi, Huanming Lu, Wang Lei, Binghui Zhao, Duanlin Que

Journal:

Journal of Crystal Growth

Year:

1999

Language:

english

File:

PDF, 603 KB

english, 1999

48

Photoluminescence properties of the composite of porous alumina and poly (2,5-dibutoxy-1,4 phenylenevinylene)

Yi Zhao, Deren Yang, Chengyao Zhou, Qing Yang, Duanlin Que

Journal:

Journal of Luminescence

Year:

2003

Language:

english

File:

PDF, 147 KB

english, 2003

49

Effect of oxygen precipitation on voids in bulk silicon

Xuegong Yu, Deren Yang, Xiangyang Ma, Jin Xu, Liben Li, Duanlin Que

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 406 KB

english, 2003

50

Effect of nitrogen doping on the minority carrier lifetime in Czochralski silicon

Can Cui, Deren Yang, Xuegong Yu, Xiangyang Ma, Liben Li, Duanlin Que

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 121 KB

english, 2003

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